FG Mikro- und Nanosysteme
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- Open Access (6)
Keywords
- Accelerometer (1)
- Acoustic electrostatic actuators (1)
- Acoustic transducers (1)
- Capacitors (1)
- Duffing oscillator (1)
- Electrostatic actuator (1)
- Electrostatics (1)
- Engineering (1)
- Force (1)
- Harmonic distortions (1)