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Schenk, Harald
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Method for generating a micromechanical structure
(2013)
Jung, Denis
;
Drabe, Christian
;
Schenk, Harald
;
Sandner, Thilo
;
Klose, Thomas
;
Wolter, Alexander
Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head
(2012)
Grahmann, Jan
;
Wildenhain, Michael
;
Grashoff, Thomas
;
Gerwig, Christian
;
Dallmann, Hans-Georg
;
Wolter, Alexander
;
Schenk, Harald
Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use
(2012)
Klose, Thomas
;
Wolter, Alexander
;
Schenk, Harald
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