Refine
Document Type
Institute
We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.
Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers
(2014)
Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera
(2014)
Micromechanical element
(2015)