Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
Author: | Anna Andrle, Philipp Hönicke, Philipp-Immanuel Schneider, Yves Kayser, Martin Hammerschmidt, Sven BurgerORCiD, Frank Scholze, Burkhard Beckhoff, Victor Soltwisch |
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Document Type: | Article |
Parent Title (English): | Proc. SPIE |
Volume: | 11057 |
First Page: | 110570M |
Year of first publication: | 2019 |
ArXiv Id: | http://arxiv.org/abs/2104.13749 |
DOI: | https://doi.org/10.1117/12.2526082 |