Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry
Author: | Peter Petrik, Nitish Kumar, Miklos Fried, Bálint Fodor, György Juhász, Silvania Pereira, Sven BurgerORCiD, H. Paul Urbach |
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Document Type: | Article |
Parent Title (English): | J. Eur. Opt. Soc.-Rapid |
Volume: | 10 |
First Page: | 15002 |
Year of first publication: | 2015 |
DOI: | https://doi.org/10.2971/jeos.2015.15002 |