Fachbereich Technik
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Sensing is nowadays an accepted application of phononic crystals with chemical and biosensors for liquid analytes being the perhaps most promising ones. A liquid-filled defect is introduced that turns into a resonant cavity. Similar to the well-known resonant sensors sensitivity can be increased with higher operating frequencies. We introduce a Sandwiched Phononic Crystal (SPC), which applies a resonant cavity located between two stacked layers on top of a SAW device. Key challenges are coupling of surface acoustic wave into the liquid cavities and avoiding scattering of the guided waves into the bulk of the sensor chip.