5 Werkstofftechnik
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This paper presents, the investigation of tunable components based on LTCC technology, implementing ferroelectric tunable thick-film dielectric. The tunable loaded line phase shifters are fabricated with metal-insulator-metal (MIM) varactors to demonstrate the capabilities of this method for packaging of the tunable components. The MIM varactors consist of one tunable dielectric paste layer that is printed between two silver layers. The tunable ferroelectric paste is optimized for LTCC sintering temperature around 850°C. The phase shifters are fabricated in two different process. They were achieved a figure of merit of 24°/dB (phase shift 192°) at 3 GHz and 18°/dB (phase shift 98°) at 4.4 GHz by using seven unit cells that each unit cell consisting of two MIM varactors.
Integration of screen-printed tunable BST thick films in LTCC modules for microwave applications
(2017)
Reconfigurable microwave components play an important role in modern communication systems to meet the increasing demands for functionality and flexibility of the systems. Various technologies, such as semiconductor technology, microelectromechanical systems (MEMS) or ferroelectric thin and thick films, are suitable for the realization of tunable microwave components. Ferroelectric materials are characterized by high tuning speeds, negligible power consumption and low manufacturing costs. In particular, ferroelectric thick films based on barium strontium titanate (BaxSr1-xTiO3, BST) are promising systems for use in the frequency range up to approx. 12 GHz. However, due to the high sintering temperatures above 1100°C for pure BST thick films, the fabrication of tunable components based on silver or gold electrodes is limited to planar structures, which are applied after the sintering process.
In this presentation, it will be shown the development of BST-ZnO-B2O3 composite materials for reducing the sintering temperature to 850-900°C. Furthermore, the material and component properties of these composites or rather corresponding MIM (metal-insulator-metal) varactors are presented and compared to planar-structured varactors. The LTCC integration potential of such fully screen-printed MIM varactors based on the developed low sintering BST composites are investigated by the fabrication of phase shifters embedded in LTCC modules.