We present results for a microsystem inchworm motor based on Nanoscopic Electrostatic Drive (NED) actuators, fabricated by single crystalline silicon bulk micro-machining on a silicon-on-insulator (SOI) wafer. Actuator elements can easily be added to or removed from the inchworm drive allowing a high adaptability of force and contact area with the movable surface as well as an efficient use of the system’s footprint. In principle, travel ranges of several mm can be easily obtained due to very modular design of the system. The presented inchworm drive is capable of controllable motion up to 1 mm and can generate a force of 1.4 mN at 130V corresponding to a force density of 0.8 mN/mm2 with an average maximum DC power consumption of 11.8 muW in each cycle. Furthermore, the voltage-displacement characteristics of the actuator element was validated by finite element method (FEM).
different perovskite-type supports considering ABO3 (such as A= Al, La with B=Ce and A=Mg, Mn with B=Zr) were prepared via the sol-gel method. Ni metal loading of 10 wt.% was deposited on prepared perovskite supports via the impregnation method. The catalysts were characterized using XRD and FTIR techniques. The DRM activity was carried out in a tubular reactor as described in our previous study [5]. The catalytic performance was assessed in the temperature range of 500–700 ◦C, CH4/CO2 = 1/1 and under GHSV of 12,000 h–1. Among the prepared catalysts, Ni-doped perovskite combination (i.e. A=Mg with B=Zr)O3-δ exhibited higher (CH4, CO2) conversion ca. (69, 59) percent and syngas yield of ca. (H2/CO =0.72) at 700 oC. This indicates that the magnesium zirconate perovskite catalyst established strong interfacial metal-support interaction, redox properties and surface basic sites that linked with good performance of the catalyst during DRM process.