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Author
Beck, Romuald B.
(2)
Bieniek, Tomasz
(2)
Cwil, M.
(2)
Hoffmann, Patrick
(2)
Jakubowski, Andrzej
(2)
Konarski, Piotr
(2)
Schmeißer, Dieter
(2)
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2008
(1)
2006
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Article
(2)
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English
(2)
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oxynitride
(1)
ultrashallow
(1)
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FG Angewandte Physik und Halbleiterspektroskopie
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Application of r.f. plasma ultrashallow nitrogen ion implantation for pedestal oxynitride layer formation
(2008)
Bieniek, Tomasz
;
Beck, Romuald B.
;
Jakubowski, Andrzej
;
Konarski, Piotr
;
Cwil, M.
;
Hoffmann, Patrick
;
Schmeißer, Dieter
Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor
(2006)
Bieniek, Tomasz
;
Beck, Romuald B.
;
Jakubowski, Andrzej
;
Hoffmann, Patrick
;
Schmeißer, Dieter
;
Konarski, Piotr
;
Cwil, M.
1
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2
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