Deutsch
Login
Open Access
Home
Search
Browse
Publish
FAQ
Overview Statistic: PDF-Downloads (blue) and Frontdoor-Views (gray)
Schließen
Author(s)
All words
At least one word
None of the words
Title
All words
At least one word
None of the words
Additional Person(s)
All words
At least one word
None of the words
Referee(s)
All words
At least one word
None of the words
Abstract
All words
At least one word
None of the words
Fulltext
All words
None of the words
Refine
Author
Soltwisch, Victor
(11)
Burger, Sven
(7)
Scholze, Frank
(6)
Krumrey, Michael
(5)
Hammerschmidt, Martin
(4)
Schneider, Philipp-Immanuel
(4)
Andrle, Anna
(3)
Haase, Anton
(3)
Hönicke, Philipp
(3)
Kayser, Yves
(3)
Probst, Jürgen
(3)
Wernecke, Jan
(3)
Bodermann, Bernd
(2)
Endres, Johannes
(2)
Gwalt, Grzegorz
(2)
Pflüger, Mika
(2)
Schoengen, Max
(2)
Siewert, Frank
(2)
Agcos, Emil
(1)
Beckhoff, Burkhard
(1)
Dai, Gaoliang
(1)
Fernández Herrero, Analia
(1)
Fernández Herrero, Analía
(1)
Hansen, Poul-Erik
(1)
Heidenreich, Sebastian
(1)
Kline, R Joseph
(1)
Kline, R. Joseph
(1)
Laubis, Christian
(1)
Loechel, Bernd
(1)
Madsen, Morten
(1)
Nielson, Lars
(1)
Pomplun, Jan
(1)
Rockstuhl, Carsten
(1)
Santiago, Xavier Garcia
(1)
Ullrich, Albrecht
(1)
Wurm, Matthias
(1)
- less
Year of publication
2021
(2)
2020
(2)
2019
(2)
2016
(1)
2015
(1)
2014
(2)
2013
(1)
Document Type
Article
(7)
In Proceedings
(3)
Research data
(1)
Language
English
(11)
Has Fulltext
no
(11)
Is part of the Bibliography
no
(11)
Institute
Computational Nano Optics
(11)
Numerical Mathematics
(11)
Modeling and Simulation of Complex Processes
(4)
11
search hits
1
to
11
Export
BibTeX
CSV
RIS
XML
100
10
20
50
100
Sort by
Year
Year
Title
Title
Author
Author
Determination of line profiles on photomasks using DUV, EUV and X-ray scattering
(2014)
Scholze, Frank
;
Bodermann, Bernd
;
Burger, Sven
;
Endres, Johannes
;
Haase, Anton
;
Krumrey, Michael
;
Laubis, Christian
;
Soltwisch, Victor
;
Ullrich, Albrecht
;
Wernecke, Jan
Correlated diffuse x-ray scattering from periodically nanostructured surfaces
(2016)
Soltwisch, Victor
;
Haase, Anton
;
Wernecke, Jan
;
Probst, Jürgen
;
Schoengen, Max
;
Burger, Sven
;
Krumrey, Michael
;
Scholze, Frank
Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle
(2013)
Soltwisch, Victor
;
Burger, Sven
;
Scholze, Frank
Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing
(2015)
Agcos, Emil
;
Bodermann, Bernd
;
Burger, Sven
;
Dai, Gaoliang
;
Endres, Johannes
;
Hansen, Poul-Erik
;
Nielson, Lars
;
Madsen, Morten
;
Heidenreich, Sebastian
;
Krumrey, Michael
;
Loechel, Bernd
;
Probst, Jürgen
;
Scholze, Frank
;
Soltwisch, Victor
;
Wurm, Matthias
Determination of line profile on nanostructured surfaces using EUV and x-ray scattering
(2014)
Soltwisch, Victor
;
Wernecke, Jan
;
Haase, Anton
;
Probst, Jürgen
;
Schoengen, Max
;
Scholze, Frank
;
Pomplun, Jan
;
Burger, Sven
GIXRF and machine learning as metrological tools for shape and element sensitive reconstructions of periodic nanostructures
(2021)
Andrle, Anna
;
Hönicke, Philipp
;
Gwalt, Grzegorz
;
Schneider, Philipp-Immanuel
;
Kayser, Yves
;
Siewert, Frank
;
Soltwisch, Victor
Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
(2019)
Andrle, Anna
;
Hönicke, Philipp
;
Schneider, Philipp-Immanuel
;
Kayser, Yves
;
Hammerschmidt, Martin
;
Burger, Sven
;
Scholze, Frank
;
Beckhoff, Burkhard
;
Soltwisch, Victor
Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction
(2019)
Schneider, Philipp-Immanuel
;
Santiago, Xavier Garcia
;
Soltwisch, Victor
;
Hammerschmidt, Martin
;
Burger, Sven
;
Rockstuhl, Carsten
Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering
(2020)
Pflüger, Mika
;
Kline, R. Joseph
;
Fernández Herrero, Analia
;
Hammerschmidt, Martin
;
Soltwisch, Victor
;
Krumrey, Michael
Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code]
(2020)
Pflüger, Mika
;
Kline, R Joseph
;
Fernández Herrero, Analía
;
Hammerschmidt, Martin
;
Soltwisch, Victor
;
Krumrey, Michael
Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning
(2021)
Andrle, Anna
;
Hönicke, Philipp
;
Gwalt, Grzegorz
;
Schneider, Philipp-Immanuel
;
Kayser, Yves
;
Siewert, Frank
;
Soltwisch, Victor
1
to
11
Accept ✔
Diese Webseite verwendet technisch erforderliche Session-Cookies. Durch die weitere Nutzung der Webseite stimmen Sie diesem zu.
Unsere Datenschutzerklärung finden Sie hier.