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Author
Hammerschmidt, Martin
(2)
Krumrey, Michael
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Pflüger, Mika
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Soltwisch, Victor
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Fernández Herrero, Analia
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Fernández Herrero, Analía
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Kline, R Joseph
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Kline, R. Joseph
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2020
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Computational Nano Optics
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Modeling and Simulation of Complex Processes
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Numerical Mathematics
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Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering
(2020)
Pflüger, Mika
;
Kline, R. Joseph
;
Fernández Herrero, Analia
;
Hammerschmidt, Martin
;
Soltwisch, Victor
;
Krumrey, Michael
Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code]
(2020)
Pflüger, Mika
;
Kline, R Joseph
;
Fernández Herrero, Analía
;
Hammerschmidt, Martin
;
Soltwisch, Victor
;
Krumrey, Michael
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