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Burger, Sven
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Krumrey, Michael
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Scholze, Frank
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Bodermann, Bernd
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Joint Research on Scatterometry and AFM Wafer Metrology
(2011)
Bodermann, Bernd
;
Buhr, Egbert
;
Danzebrink, Hans-Ulrich
;
Bär, Markus
;
Scholze, Frank
;
Krumrey, Michael
;
Wurm, Matthias
;
Klapetek, Petr
;
Hansen, Poul-Erik
;
Korpelainen, Virpi
;
van Veghel, Marijn
;
Yacoot, Andrew
;
Siitonen, Samuli
;
El Gawhary, Omar
;
Burger, Sven
;
Saastamoinen, Toni
Determination of line profiles on photomasks using DUV, EUV and X-ray scattering
(2014)
Scholze, Frank
;
Bodermann, Bernd
;
Burger, Sven
;
Endres, Johannes
;
Haase, Anton
;
Krumrey, Michael
;
Laubis, Christian
;
Soltwisch, Victor
;
Ullrich, Albrecht
;
Wernecke, Jan
Correlated diffuse x-ray scattering from periodically nanostructured surfaces
(2016)
Soltwisch, Victor
;
Haase, Anton
;
Wernecke, Jan
;
Probst, Jürgen
;
Schoengen, Max
;
Burger, Sven
;
Krumrey, Michael
;
Scholze, Frank
Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing
(2015)
Agcos, Emil
;
Bodermann, Bernd
;
Burger, Sven
;
Dai, Gaoliang
;
Endres, Johannes
;
Hansen, Poul-Erik
;
Nielson, Lars
;
Madsen, Morten
;
Heidenreich, Sebastian
;
Krumrey, Michael
;
Loechel, Bernd
;
Probst, Jürgen
;
Scholze, Frank
;
Soltwisch, Victor
;
Wurm, Matthias
Die mathematische Forschungsdateninitiative in der NFDI: MaRDI (Mathematical Research Data Initiative)
(2022)
Benner, Peter
;
Burger, Michael
;
Göddeke, Dominik
;
Görgen, Christiane
;
Himpe, Christian
;
Heiland, Jan
;
Koprucki, Thomas
;
Ohlberger, Mario
;
Rave, Stephan
;
Reidelbach, Marco
;
Saak, Jens
;
Schöbel, Anita
;
Tabelow, Karsten
;
Weber, Marcus
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