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Hammerschmidt, Martin
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finite element method
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reduced basis method
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optical metrology
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rigorous optical modeling
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electromagnetic field solver
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adaptive sampling
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computational lithography
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Machine-learning driven design of metasurfaces: learn the physics and not the objective function
(2024)
Sekuliĉ, Ivan
;
Schneider, Philipp-Immanuel
;
Hammerschmidt, Martin
;
Burger, Sven
Introduction and application of a new approach for model-based optical bidirectional measurements
(2024)
Krüger, Jan
;
Manley, Phillip
;
Bergmann, Detlef
;
Köning, Rainer
;
Bodermann, Bernd
;
Eder, Christian
;
Heinrich, Andreas
;
Schneider, Philipp-Immanuel
;
Hammerschmidt, Martin
;
Zschiedrich, Lin
;
Manske, Eberhard
Efficient rational approximation of optical response functions with the AAA algorithm
(2024)
Betz, Fridtjof
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Hammerschmidt, Martin
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Zschiedrich, Lin
;
Burger, Sven
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Binkowski, Felix
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