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Author
Schmidt, Frank
(196)
Burger, Sven
(116)
Zschiedrich, Lin
(84)
Pomplun, Jan
(54)
Hammerschmidt, Martin
(29)
Schädle, Achim
(19)
Becker, Christiane
(15)
Klose, Roland
(15)
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(12)
Lockau, Daniel
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(202)
Keywords
finite element method
(6)
Helmholtz equation
(5)
reduced basis method
(4)
transparent boundary conditions
(4)
Transparent boundary conditions
(3)
pole condition
(3)
rigorous optical modeling
(3)
Finite-element method
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Maxwell's equations
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Numerical Mathematics
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Modeling and Simulation of Complex Processes
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Title
Author
Author
Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
Finite-element based electromagnetic field simulations: Benchmark results for isolated structures
(2013)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
Fast simulation method for parameter reconstruction in optical metrology
(2013)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Bodermann, Bernd
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Kato, Akiko
;
Laubis, Christian
;
Scholze, Frank
3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films
(2009)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Kettner, Benjamin
;
Lockau, D.
3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities
(2010)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
FEM Simulation of Plasmon Laser Resonances
(2010)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Benchmark of rigorous methods for electromagnetic field simulation
(2008)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Evanschitzky, Peter
;
Erdmann, Andreas
3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method
(2007)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Köhle, Roderick
;
Henkel, Thomas
;
Küchler, Bernd
;
Nölscher, Christoph
EMF Simulations of Isolated and Periodic 3D Photomask Patterns
(2007)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Köhle, Roderick
;
Küchler, Bernd
;
Nölscher, Christoph
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