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Schmidt, Frank
(92)
Burger, Sven
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Zschiedrich, Lin
(54)
Pomplun, Jan
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Computational Nano Optics
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Boosting the photon-extraction efficiency of nanophotonic structures by deterministic microlenses
(2014)
Gschrey, Manuel
;
Seifried, Marc
;
Krüger, Luzy
;
Schmidt, Ronny
;
Schulze, Jan-Hindrick
;
Heindel, Tobias
;
Burger, Sven
;
Rodt, Sven
;
Schmidt, Frank
;
Strittmatter, Andre
;
Reitzenstein, Stephan
Indistinguishable Photons from Deterministic Quantum Dot Microlenses
(2015)
Thoma, Alexander
;
Schnauber, Peter
;
Gschrey, Manuel
;
Schmidt, Ronny
;
Wohlfeil, Benjamin
;
Seifried, Marc
;
Schulze, Jan-Hindrick
;
Burger, Sven
;
Schmidt, Frank
;
Strittmatter, Andre
;
Rodt, Sven
;
Heindel, Tobias
;
Reitzenstein, Stephan
Advanced Quantum Light Sources: Modelling and Realization by Deterministic Nanofabrication Technologies
(2014)
Gschrey, Manuel
;
Seifried, Marc
;
Krüger, Luzy
;
Schmidt, Ronny
;
Schulze, Jan-Hindrick
;
Heindel, Tobias
;
Burger, Sven
;
Rodt, Sven
;
Schmidt, Frank
;
Strittmatter, Andre
;
Reitzenstein, Stephan
Indistinguishable Photons from Deterministically Fabricated Quantum Dot Microlenses
(2015)
Thoma, Alexander
;
Schnauber, Peter
;
Gschrey, Manuel
;
Schmidt, Ronny
;
Wohlfeil, Benjamin
;
Seifried, Marc
;
Schulze, Jan-Hindrick
;
Burger, Sven
;
Schmidt, Frank
;
Strittmatter, Andre
;
Rodt, Sven
;
Heindel, Tobias
;
Reitzenstein, Stephan
The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks
(2007)
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
;
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation
(2008)
Scholze, Frank
;
Laubis, Christian
;
Ulm, Gerhard
;
Dersch, Uwe
;
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
Metrology of EUV masks by EUV-scatterometry and finite element analysis
(2008)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters
(2006)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Zschiedrich, Lin
;
Scholze, Frank
Finite element analysis of EUV lithography
(2007)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Kato, Akiko
;
Laubis, Christian
;
Scholze, Frank
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10
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