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Hammerschmidt, Martin
(90)
Burger, Sven
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Zschiedrich, Lin
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Schmidt, Frank
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Schneider, Philipp-Immanuel
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Betz, Fridtjof
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finite element method
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reduced basis method
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optical metrology
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rigorous optical modeling
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electromagnetic field solver
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adaptive sampling
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computational lithography
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computational metrology
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domain decomposition
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finite- element methods
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Numerical Mathematics
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Computational Nano Optics
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Using Gaussian process regression for efficient parameter reconstruction
(2019)
Schneider, Philipp-Immanuel
;
Hammerschmidt, Martin
;
Zschiedrich, Lin
;
Burger, Sven
Modal analysis for nanoplasmonics with nonlocal material properties
(2019)
Binkowski, Felix
;
Zschiedrich, Lin
;
Hammerschmidt, Martin
;
Burger, Sven
Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
(2019)
Andrle, Anna
;
Hönicke, Philipp
;
Schneider, Philipp-Immanuel
;
Kayser, Yves
;
Hammerschmidt, Martin
;
Burger, Sven
;
Scholze, Frank
;
Beckhoff, Burkhard
;
Soltwisch, Victor
Efficient global sensitivity analysis for silicon line gratings using polynomial chaos
(2019)
Farchmin, Nando
;
Hammerschmidt, Martin
;
Schneider, Philipp-Immanuel
;
Wurm, Matthias
;
Bär, Markus
;
Heidenreich, Sebastian
Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction
(2019)
Schneider, Philipp-Immanuel
;
Santiago, Xavier Garcia
;
Soltwisch, Victor
;
Hammerschmidt, Martin
;
Burger, Sven
;
Rockstuhl, Carsten
Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering
(2020)
Pflüger, Mika
;
Kline, R. Joseph
;
Fernández Herrero, Analia
;
Hammerschmidt, Martin
;
Soltwisch, Victor
;
Krumrey, Michael
Nanophotonic Enhancement of Light Out-Coupling for Deep-UV LEDs
(2019)
Manley, Phillip
;
Hammerschmidt, Martin
;
Burger, Sven
;
Becker, Christiane
Spectral Expansion of the Scattering Response of Resonant Nanostructures
(2019)
Binkowski, Felix
;
Zschiedrich, Lin
;
Schneider, Philipp-Immanuel
;
Hammerschmidt, Martin
;
Santiago, Xavier Garcia
;
Betz, Fridtjof
;
Burger, Sven
Numerical optimization of resonant nanophotonic devices
(2019)
Binkowski, Felix
;
Schneider, Philipp-Immanuel
;
Hammerschmidt, Martin
;
Zschiedrich, Lin
;
Burger, Sven
Decomposition of scattered electromagnetic fields into vector spherical wave functions on surfaces with general shapes
(2019)
Santiago, Xavier Garcia
;
Hammerschmidt, Martin
;
Burger, Sven
;
Rockstuhl, Carsten
;
Fernandez-Corbaton, Ivan
;
Zschiedrich, Lin
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60
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