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Pomplun, Jan (35)
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Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters
(2006)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Zschiedrich, Lin
;
Scholze, Frank
Advanced FEM Analysis of Nano-Optical Devices
(2006)
Burger, Sven
;
Zschiedrich, Lin
;
Schädle, Achim
;
Klose, Roland
;
Kettner, Benjamin
;
Pomplun, Jan
;
Pollok, T.
;
Schmidt, Frank
The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks
(2007)
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
;
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
Finite element analysis of EUV lithography
(2007)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
FEM investigation of leaky modes in hollow core photonic crystal fibers
(2007)
Pomplun, Jan
;
Holzlöhner, Ronald
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Goal oriented adaptive finite element method for precise simulation of optical components
(2007)
Zschiedrich, Lin
;
Burger, Sven
;
Pomplun, Jan
;
Schmidt, Frank
JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics
(2008)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
Advanced FEM analysis of optical waveguides: algorithms and applications
(2008)
Schmidt, Frank
;
Burger, Sven
;
Pomplun, Jan
;
Zschiedrich, Lin
Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation
(2008)
Scholze, Frank
;
Laubis, Christian
;
Ulm, Gerhard
;
Dersch, Uwe
;
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
Metrology of EUV masks by EUV-scatterometry and finite element analysis
(2008)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films
(2009)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Kettner, Benjamin
;
Lockau, D.
Reduced basis method for computational lithography
(2009)
Pomplun, Jan
;
Zschiedrich, Lin
;
Burger, Sven
;
Schmidt, Frank
Reduced basis method for source mask optimization
(2010)
Pomplun, Jan
;
Zschiedrich, Lin
;
Burger, Sven
;
Schmidt, Frank
;
Tyminski, Jacek
;
Flagello, Donis
;
Toshiharu, N.
Finite element method for accurate 3D simulation of plasmonic waveguides
(2010)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
Adaptive Reduced Basis Method for Optical Scattering Problems
(2010)
Pomplun, Jan
;
Schmidt, Frank
;
Burger, Sven
;
Zschiedrich, Lin
Reduced basis method for real-time inverse scatterometry
(2011)
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Kato, Akiko
;
Laubis, Christian
;
Scholze, Frank
Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap
(2011)
Burger, Sven
;
Pomplun, Jan
;
Schmidt, Frank
;
Zschiedrich, Lin
Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness
(2011)
Kleemann, B.
;
Kurz, J.
;
Hetzler, J.
;
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
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