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Author
Burger, Sven
(14)
Schmidt, Frank
(10)
Zschiedrich, Lin
(10)
Pomplun, Jan
(8)
Scholze, Frank
(2)
Biancalana, F.
(1)
Bodermann, Bernd
(1)
Buhr, Egbert
(1)
Bär, Markus
(1)
Crump, Paul
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2011 (14)
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In Proceedings
(11)
Article
(3)
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English
(14)
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(14)
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Computational Nano Optics
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Numerical Mathematics
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Joint Research on Scatterometry and AFM Wafer Metrology
(2011)
Bodermann, Bernd
;
Buhr, Egbert
;
Danzebrink, Hans-Ulrich
;
Bär, Markus
;
Scholze, Frank
;
Krumrey, Michael
;
Wurm, Matthias
;
Klapetek, Petr
;
Hansen, Poul-Erik
;
Korpelainen, Virpi
;
van Veghel, Marijn
;
Yacoot, Andrew
;
Siitonen, Samuli
;
El Gawhary, Omar
;
Burger, Sven
;
Saastamoinen, Toni
Localized resonant states and transmission in a two- dimensional photonic quasicrystal
(2011)
Neve-Oz, Y.
;
Pollok, T.
;
Burger, Sven
;
Golosovsky, M.
;
Davidov, D.
Reduced basis method for real-time inverse scatterometry
(2011)
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Kato, Akiko
;
Laubis, Christian
;
Scholze, Frank
Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap
(2011)
Burger, Sven
;
Pomplun, Jan
;
Schmidt, Frank
;
Zschiedrich, Lin
Rigorous optical simulation of light management in crystalline silicon thin film solar cells with rough interface textures
(2011)
Lockau, D.
;
Zschiedrich, Lin
;
Burger, Sven
;
Schmidt, Frank
;
Ruske, F.
;
Rech, Bernd
Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness
(2011)
Kleemann, B.
;
Kurz, J.
;
Hetzler, J.
;
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Large-Area High-Quality Plasmonic Oligomers Fabricated by Angle-Controlled Colloidal Nanolithography
(2011)
Zhao, J.
;
Frank, B.
;
Burger, Sven
;
Giessen, H.
Finite element simulation of optical modes in VCSELs
(2011)
Pomplun, Jan
;
Burger, Sven
;
Rozova, Maria
;
Zschiedrich, Lin
;
Schmidt, Frank
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