Deutsch
Login
Open Access
Home
Search
Browse
Publish
FAQ
Overview Statistic: PDF-Downloads (blue) and Frontdoor-Views (gray)
Schließen
Author(s)
All words
At least one word
None of the words
Title
All words
At least one word
None of the words
Additional Person(s)
All words
At least one word
None of the words
Referee(s)
All words
At least one word
None of the words
Abstract
All words
At least one word
None of the words
Fulltext
All words
None of the words
Refine
Author
Burger, Sven
(380)
Zschiedrich, Lin
(126)
Schmidt, Frank
(116)
Hammerschmidt, Martin
(73)
Pomplun, Jan
(53)
Binkowski, Felix
(49)
Schneider, Philipp-Immanuel
(40)
Becker, Christiane
(34)
Betz, Fridtjof
(30)
Gutsche, Philipp
(26)
+ more
Year of publication
2024
(22)
2023
(15)
2022
(26)
2021
(19)
2020
(21)
2019
(29)
2018
(30)
2017
(13)
2016
(29)
2015
(17)
+ more
Document Type
Article
(182)
In Proceedings
(150)
Research data
(13)
Book chapter
(12)
ZIB-Report
(9)
Poster
(7)
Other
(4)
Doctoral Thesis
(1)
In Collection
(1)
Software
(1)
+ more
Language
English
(378)
German
(2)
Has Fulltext
no
(371)
yes
(9)
Is part of the Bibliography
no
(380)
Keywords
finite element method
(5)
reduced basis method
(4)
optical metrology
(3)
electromagnetic field solver
(2)
rigorous optical modeling
(2)
Helmholtz equation
(1)
Lithography
(1)
Maxwell's equations
(1)
adaptive sampling
(1)
computational lithography
(1)
+ more
Institute
Numerical Mathematics
(355)
Computational Nano Optics
(352)
Modeling and Simulation of Complex Processes
(103)
AI in Society, Science, and Technology
(2)
Mathematics for Life and Materials Science
(1)
ZIB Allgemein
(1)
380
search hits
52
to
71
Export
BibTeX
CSV
RIS
XML
20
10
20
50
100
Sort by
Year
Year
Title
Title
Author
Author
Localized resonant states and transmission in a two- dimensional photonic quasicrystal
(2011)
Neve-Oz, Y.
;
Pollok, T.
;
Burger, Sven
;
Golosovsky, M.
;
Davidov, D.
Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation
(2008)
Scholze, Frank
;
Laubis, Christian
;
Ulm, Gerhard
;
Dersch, Uwe
;
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
Metrology of EUV masks by EUV-scatterometry and finite element analysis
(2008)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters
(2006)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Zschiedrich, Lin
;
Scholze, Frank
Finite element analysis of EUV lithography
(2007)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
Finite element simulation of the optical modes of semiconductor lasers
(2010)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Schliwa, Andrei
;
Bimberg, Dieter
;
Pietrzak, Agnieszka
;
Wenzel, Hans
;
Erbert, Götz
Adaptive finite element method for simulation of optical nano structures
(2007)
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
FEM investigation of leaky modes in hollow core photonic crystal fibers
(2007)
Pomplun, Jan
;
Holzlöhner, Ronald
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Adaptive Reduced Basis Method for Optical Scattering Problems
(2010)
Pomplun, Jan
;
Schmidt, Frank
;
Burger, Sven
;
Zschiedrich, Lin
Finite element simulation of radiation losses in photonic crystal fibers
(2007)
Pomplun, Jan
;
Zschiedrich, Lin
;
Klose, Roland
;
Schmidt, Frank
;
Burger, Sven
Reduced basis method for real-time inverse scatterometry
(2011)
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Thermo-optical simulation of high-power diode lasers
(2012)
Pomplun, Jan
;
Wenzel, Hans
;
Burger, Sven
;
Zschiedrich, Lin
;
Rozova, Maria
;
Schmidt, Frank
;
Crump, Paul
;
Ekhteraei, Hossein
;
Schultz, Christoph M.
;
Erbert, Götz
Reconstruction of the wave functions of coupled nanoscopic emitters using a coherent optical technique
(2012)
Richter, Marten
;
Schlosser, Felix
;
Schoth, Mario
;
Burger, Sven
;
Schmidt, Frank
;
Knorr, Andreas
;
Mukamel, Shaul
3D finite element simulation of optical modes in VCSELs
(2012)
Rozova, Maria
;
Pomplun, Jan
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Burger, Sven
Advanced FEM Analysis of Nano-Optical Devices
(2006)
Burger, Sven
;
Zschiedrich, Lin
;
Schädle, Achim
;
Klose, Roland
;
Kettner, Benjamin
;
Pomplun, Jan
;
Pollok, T.
;
Schmidt, Frank
3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method
(2007)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Köhle, Roderick
;
Henkel, Thomas
;
Küchler, Bernd
;
Nölscher, Christoph
EMF Simulations of Isolated and Periodic 3D Photomask Patterns
(2007)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Köhle, Roderick
;
Küchler, Bernd
;
Nölscher, Christoph
Benchmark of rigorous methods for electromagnetic field simulation
(2008)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Evanschitzky, Peter
;
Erdmann, Andreas
Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Kato, Akiko
;
Laubis, Christian
;
Scholze, Frank
52
to
71
Accept ✔
Diese Webseite verwendet technisch erforderliche Session-Cookies. Durch die weitere Nutzung der Webseite stimmen Sie diesem zu.
Unsere Datenschutzerklärung finden Sie hier.