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Burger, Sven
(380)
Zschiedrich, Lin
(126)
Schmidt, Frank
(116)
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(73)
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Binkowski, Felix
(49)
Schneider, Philipp-Immanuel
(40)
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(34)
Betz, Fridtjof
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finite element method
(5)
reduced basis method
(4)
optical metrology
(3)
electromagnetic field solver
(2)
rigorous optical modeling
(2)
Helmholtz equation
(1)
Lithography
(1)
Maxwell's equations
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adaptive sampling
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computational lithography
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Numerical Mathematics
(355)
Computational Nano Optics
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Modeling and Simulation of Complex Processes
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AI in Society, Science, and Technology
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380
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Title
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Author
Finite element models of lithographic mask topography
(2012)
Tyminski, Jacek
;
Popescu, Raluca
;
Burger, Sven
;
Pomplun, Jan
;
Zschiedrich, Lin
;
Matsuyama, Tomoyuki
;
Noda, Tomoya
Joint Research on Scatterometry and AFM Wafer Metrology
(2011)
Bodermann, Bernd
;
Buhr, Egbert
;
Danzebrink, Hans-Ulrich
;
Bär, Markus
;
Scholze, Frank
;
Krumrey, Michael
;
Wurm, Matthias
;
Klapetek, Petr
;
Hansen, Poul-Erik
;
Korpelainen, Virpi
;
van Veghel, Marijn
;
Yacoot, Andrew
;
Siitonen, Samuli
;
El Gawhary, Omar
;
Burger, Sven
;
Saastamoinen, Toni
Localized resonant states and transmission in a two- dimensional photonic quasicrystal
(2011)
Neve-Oz, Y.
;
Pollok, T.
;
Burger, Sven
;
Golosovsky, M.
;
Davidov, D.
Reduced basis method for real-time inverse scatterometry
(2011)
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Kato, Akiko
;
Laubis, Christian
;
Scholze, Frank
Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap
(2011)
Burger, Sven
;
Pomplun, Jan
;
Schmidt, Frank
;
Zschiedrich, Lin
Rigorous optical simulation of light management in crystalline silicon thin film solar cells with rough interface textures
(2011)
Lockau, D.
;
Zschiedrich, Lin
;
Burger, Sven
;
Schmidt, Frank
;
Ruske, F.
;
Rech, Bernd
Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness
(2011)
Kleemann, B.
;
Kurz, J.
;
Hetzler, J.
;
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Large-Area High-Quality Plasmonic Oligomers Fabricated by Angle-Controlled Colloidal Nanolithography
(2011)
Zhao, J.
;
Frank, B.
;
Burger, Sven
;
Giessen, H.
Finite element simulation of optical modes in VCSELs
(2011)
Pomplun, Jan
;
Burger, Sven
;
Rozova, Maria
;
Zschiedrich, Lin
;
Schmidt, Frank
Ultrafast nonlinear spectroscopy with spatially confined fields
(2011)
Schlosser, Felix
;
Schoth, Mario
;
Burger, Sven
;
Schmidt, Frank
;
Knorr, Andreas
;
Mukamel, S.
;
Richter, Marten
Fast online simulation of 3D nanophotonic structures by the reduced basis method
(2011)
Schmidt, Frank
;
Pomplun, Jan
;
Zschiedrich, Lin
;
Burger, Sven
Strongly Twisted Solid-Core PCF: A One-Dimensional Chiral Metamaterial
(2011)
Wong, G.
;
Kang, M.
;
Lee, H.
;
Burger, Sven
;
Zschiedrich, Lin
;
Biancalana, F.
;
Russell, P.
Theoretical and experimental analysis of the lateral modes of high-power broad-area lasers
(2011)
Wenzel, Hans
;
Crump, Paul
;
Ekhteraei, Hossein
;
Schultz, Christoph M.
;
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Erbert, Götz
3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities
(2010)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
FEM simulation of resonances in low-Q cavities for plasmon lasers
(2010)
Burger, Sven
;
Schmidt, Frank
;
Zschiedrich, Lin
Numerical investigation of optical resonances in circular grating resonators
(2010)
Burger, Sven
;
Schmidt, Frank
;
Zschiedrich, Lin
Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides
(2010)
Burger, Sven
;
Schmidt, Frank
;
Zschiedrich, Lin
Reduced basis method for source mask optimization
(2010)
Pomplun, Jan
;
Zschiedrich, Lin
;
Burger, Sven
;
Schmidt, Frank
;
Tyminski, Jacek
;
Flagello, Donis
;
Toshiharu, N.
271
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290
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