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Finite-element simulations of light propagation through subwavelength apertures in metal films
(2009)
3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films
(2009)
Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation
(2008)
A rigorous finite-element domain decomposition method for electromagnetic near field simulations
(2008)
We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer.
Efficient optimization of hollow-core photonic crystal fiber design using the finite-element method
(2006)
Domain decomposition method for electromagnetic scattering problems: application to EUV lithography
(2005)
The solution of scattering problems described by the Helmholtz equation on unbounded domains is of importance for a wide variety of applications, for example in electromagnetics and acoustics. An implementation of a solver for scattering problems based on the programming language Matlab is introduced. The solver relies on the finite-element-method and on the perfectly-matched-layer-method, which allows for the simulation of scattering problems on complex geometries surrounded by inhomogeneous exterior domains. This report gives a number of detailed examples and can be understood as a user manual to the freely accessible code of the solver HelmPole.
Dynamics of a Bose-Einstein condensate at finite temperature in an atom-optical coherence filter
(2002)