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Burger, Sven
(377)
Zschiedrich, Lin
(126)
Schmidt, Frank
(116)
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(73)
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Binkowski, Felix
(48)
Schneider, Philipp-Immanuel
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Becker, Christiane
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Betz, Fridtjof
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finite element method
(5)
reduced basis method
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optical metrology
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electromagnetic field solver
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rigorous optical modeling
(2)
Helmholtz equation
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Maxwell's equations
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adaptive sampling
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computational lithography
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Numerical Mathematics
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Computational Nano Optics
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Modeling and Simulation of Complex Processes
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AI in Society, Science, and Technology
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377
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Title
Author
Author
Reduced basis method for real-time inverse scatterometry
(2011)
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Thermo-optical simulation of high-power diode lasers
(2012)
Pomplun, Jan
;
Wenzel, Hans
;
Burger, Sven
;
Zschiedrich, Lin
;
Rozova, Maria
;
Schmidt, Frank
;
Crump, Paul
;
Ekhteraei, Hossein
;
Schultz, Christoph M.
;
Erbert, Götz
Reconstruction of the wave functions of coupled nanoscopic emitters using a coherent optical technique
(2012)
Richter, Marten
;
Schlosser, Felix
;
Schoth, Mario
;
Burger, Sven
;
Schmidt, Frank
;
Knorr, Andreas
;
Mukamel, Shaul
3D finite element simulation of optical modes in VCSELs
(2012)
Rozova, Maria
;
Pomplun, Jan
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Burger, Sven
Advanced FEM Analysis of Nano-Optical Devices
(2006)
Burger, Sven
;
Zschiedrich, Lin
;
Schädle, Achim
;
Klose, Roland
;
Kettner, Benjamin
;
Pomplun, Jan
;
Pollok, T.
;
Schmidt, Frank
3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method
(2007)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Köhle, Roderick
;
Henkel, Thomas
;
Küchler, Bernd
;
Nölscher, Christoph
EMF Simulations of Isolated and Periodic 3D Photomask Patterns
(2007)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Köhle, Roderick
;
Küchler, Bernd
;
Nölscher, Christoph
Benchmark of rigorous methods for electromagnetic field simulation
(2008)
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
;
Evanschitzky, Peter
;
Erdmann, Andreas
Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
(2011)
Burger, Sven
;
Zschiedrich, Lin
;
Pomplun, Jan
;
Schmidt, Frank
;
Kato, Akiko
;
Laubis, Christian
;
Scholze, Frank
62
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71
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