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Burger, Sven
(377)
Zschiedrich, Lin
(126)
Schmidt, Frank
(116)
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Binkowski, Felix
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Becker, Christiane
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finite element method
(5)
reduced basis method
(4)
optical metrology
(3)
electromagnetic field solver
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rigorous optical modeling
(2)
Helmholtz equation
(1)
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Maxwell's equations
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adaptive sampling
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computational lithography
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Numerical Mathematics
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AI in Society, Science, and Technology
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377
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Author
Localized resonant states and transmission in a two- dimensional photonic quasicrystal
(2011)
Neve-Oz, Y.
;
Pollok, T.
;
Burger, Sven
;
Golosovsky, M.
;
Davidov, D.
Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation
(2008)
Scholze, Frank
;
Laubis, Christian
;
Ulm, Gerhard
;
Dersch, Uwe
;
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
Metrology of EUV masks by EUV-scatterometry and finite element analysis
(2008)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters
(2006)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Zschiedrich, Lin
;
Scholze, Frank
Finite element analysis of EUV lithography
(2007)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Scholze, Frank
;
Laubis, Christian
;
Dersch, Uwe
Finite element simulation of the optical modes of semiconductor lasers
(2010)
Pomplun, Jan
;
Burger, Sven
;
Schmidt, Frank
;
Schliwa, Andrei
;
Bimberg, Dieter
;
Pietrzak, Agnieszka
;
Wenzel, Hans
;
Erbert, Götz
Adaptive finite element method for simulation of optical nano structures
(2007)
Pomplun, Jan
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
FEM investigation of leaky modes in hollow core photonic crystal fibers
(2007)
Pomplun, Jan
;
Holzlöhner, Ronald
;
Burger, Sven
;
Zschiedrich, Lin
;
Schmidt, Frank
Adaptive Reduced Basis Method for Optical Scattering Problems
(2010)
Pomplun, Jan
;
Schmidt, Frank
;
Burger, Sven
;
Zschiedrich, Lin
Finite element simulation of radiation losses in photonic crystal fibers
(2007)
Pomplun, Jan
;
Zschiedrich, Lin
;
Klose, Roland
;
Schmidt, Frank
;
Burger, Sven
52
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61
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