Refine
Year of publication
Document Type
- Article (8)
- In Proceedings (7)
- ZIB-Report (1)
Language
- English (16) (remove)
Is part of the Bibliography
- no (16)
Keywords
- computational lithography (1)
- computational metrology (1)
- finite- element methods (1)
- nanolithography (1)
- nanooptics (1)
- optical metrology (1)