Filtern
Erscheinungsjahr
Dokumenttyp
- Artikel (43)
- Konferenzbeitrag (32)
- ZIB-Report (8)
- Forschungsdaten (5)
- Dissertation (1)
- Beitrag Sammelband (1)
- Poster (1)
Sprache
- Englisch (91)
Gehört zur Bibliographie
- nein (91)
Schlagworte
- finite element method (5)
- reduced basis method (4)
- optical metrology (3)
- rigorous optical modeling (3)
- electromagnetic field solver (2)
- adaptive sampling (1)
- computational lithography (1)
- computational metrology (1)
- domain decomposition (1)
- finite- element methods (1)
- incoherent layers (1)
- incoherent light-trapping (1)
- maxwell equation (1)
- model reduction (1)
- multi-junction solar cells (1)
- nano-photonics (1)
- nanolithography (1)
- nanooptics (1)
- optical critical dimension metrology (1)
- optical simulations (1)
- parameter estimation (1)
- parameter scans (1)
- photonic crystal (1)
- photonic crystals (1)
- reduced basis method; model reduction; electromagnetics; photonics; solar cells; nanooptics; Maxwells equations; incoherence (1)
- reduced order models (1)
- solar cells (1)
- thin-film silicon solar cells (1)
Institut
We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.