Filtern
Erscheinungsjahr
Dokumenttyp
- Artikel (43)
- Konferenzbeitrag (32)
- ZIB-Report (8)
- Forschungsdaten (5)
- Dissertation (1)
- Beitrag Sammelband (1)
- Poster (1)
Sprache
- Englisch (91)
Gehört zur Bibliographie
- nein (91)
Schlagworte
Institut
We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.