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Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures

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  • We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer.

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Metadaten
Verfasserangaben:Achim Schädle, Lin Zschiedrich, Sven BurgerORCiD, Roland Klose, Frank Schmidt
Dokumentart:ZIB-Report
Freies Schlagwort / Tag:Lithography; Maxwell's equations; conical diffraction; domain decomposition; electro-magnetic scattering; finite elements
MSC-Klassifikation:65-XX NUMERICAL ANALYSIS / 65Nxx Partial differential equations, boundary value problems / 65N55 Multigrid methods; domain decomposition
PACS-Klassifikation:00.00.00 GENERAL / 02.00.00 Mathematical methods in physics / 02.70.-c Computational techniques; simulations (for quantum computation, see 03.67.Lx; for computational techniques extensively used in subdivisions of physics, see the appropriate section; for example, see 47.11.-j Computational methods in fluid dynamics) / 02.70.Dh Finite-element and Galerkin methods
00.00.00 GENERAL / 03.00.00 Quantum mechanics, field theories, and special relativity (see also section 11 General theory of fields and particles) / 03.50.-z Classical field theories / 03.50.De Classical electromagnetism, Maxwell equations (for applied classical electromagnetism, see 41.20.-q)
40.00.00 ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS / 42.00.00 Optics (for optical properties of gases, see 51.70.+f; for optical properties of bulk materials and thin films, see 78.20.-e; for x-ray optics, see 41.50.+h) / 42.25.-p Wave optics / 42.25.Fx Diffraction and scattering
Datum der Erstveröffentlichung:06.02.2006
Schriftenreihe (Bandnummer):ZIB-Report (06-04)
ZIB-Reportnummer:06-04
Verlagspublikation:Appeared in: Journal of Computational Physics 226 (2007) 477-493
DOI:https://doi.org//10.1016/j.jcp.2007.04.017
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