Topographic mask modeling with reduced basis finite element method
Author: | Jacek Tyminski, Jan Pomplun, Lin Zschiedrich, Donis Flagello, Tomiyuki Matsuyama |
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Document Type: | Article |
Parent Title (English): | Proc. SPIE |
Volume: | 8683 |
First Page: | 86831C |
Year of first publication: | 2013 |
DOI: | https://doi.org/10.1117/12.2011613 |