A rigorous finite-element domain decomposition method for electromagnetic near field simulations
Author: | Lin Zschiedrich, Sven BurgerORCiD, Achim Schädle, Frank Schmidt |
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Editor: | Harry Levinson, Mircea Dusa |
Document Type: | In Proceedings |
Parent Title (English): | Optical Microlithography XXI |
Volume: | 6924 |
Publisher: | SPIE |
Year of first publication: | 2008 |
DOI: | https://doi.org/10.1117/12.771989 |