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Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures

  • Fields such as optical metrology and computational lithography require fast and efficient methods for solving the time-harmonic Maxwell's equation. Highly accurate geometrical modelling and numerical accuracy at low computational costs are a prerequisite for any simulation study of complex nano-structured photonic devices. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem based on the hp-adaptive finite element solver JCMsuite capable of handling geometric and non-geometric parameter dependencies allowing for online evaluations in milliseconds. We apply the RBM to compute light-scattering at optical wavelengths of periodic arrays of fin field-effect transistors (FinFETs) where geometrical properties such as the width and height of the fin and gate can vary in a large range.

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Metadaten
Author:Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Sven BurgerORCiD, Frank Schmidt
Document Type:Article
Parent Title (English):Proc. SPIE
Volume:9742
First Page:97420M
Year of first publication:2016
Preprint:urn:nbn:de:0297-zib-57239
DOI:https://doi.org/10.1117/12.2212367
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