Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures
Please always quote using this URN: urn:nbn:de:0297-zib-57239
- Fields such as optical metrology and computational lithography require fast and efficient methods for solving the time-harmonic Maxwell’s equation. Highly accurate geometrical modeling and numerical accuracy atcomputational costs are a prerequisite for any simulation study of complex nano-structured photonic devices. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem based on the hp-adaptive finite element solver JCMsuite capable of handling geometric and non-geometric parameter dependencies allowing for online evaluations in milliseconds. We apply the RBM to compute light-scatteringoptical wavelengths off periodic arrays of fin field-effect transistors (FinFETs) where geometrical properties such as the width and height of the fin and gate can vary in a large range.
Author: | Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Sven BurgerORCiD, Frank Schmidt |
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Document Type: | ZIB-Report |
Parent Title (English): | Proc. SPIE |
Volume: | 9742 |
First Page: | 97420M |
Tag: | electromagnetic field solver; finite element method; reduced basis method; reduced order models; rigorous optical modeling |
MSC-Classification: | 65-XX NUMERICAL ANALYSIS |
CCS-Classification: | G. Mathematics of Computing |
PACS-Classification: | 40.00.00 ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
Date of first Publication: | 2016/02/02 |
Series (Serial Number): | ZIB-Report (16-05) |
ISSN: | 1438-0064 |
Published in: | Proc. SPIE 9742, 97420M (2016) |
DOI: | https://doi.org/10.1117/12.2212367 |