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Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures

Please always quote using this URN: urn:nbn:de:0297-zib-57239
  • Fields such as optical metrology and computational lithography require fast and efficient methods for solving the time-harmonic Maxwell’s equation. Highly accurate geometrical modeling and numerical accuracy atcomputational costs are a prerequisite for any simulation study of complex nano-structured photonic devices. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem based on the hp-adaptive finite element solver JCMsuite capable of handling geometric and non-geometric parameter dependencies allowing for online evaluations in milliseconds. We apply the RBM to compute light-scatteringoptical wavelengths off periodic arrays of fin field-effect transistors (FinFETs) where geometrical properties such as the width and height of the fin and gate can vary in a large range.

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Author:Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Sven BurgerORCiD, Frank Schmidt
Document Type:ZIB-Report
Parent Title (English):Proc. SPIE
Volume:9742
First Page:97420M
Tag:electromagnetic field solver; finite element method; reduced basis method; reduced order models; rigorous optical modeling
MSC-Classification:65-XX NUMERICAL ANALYSIS
CCS-Classification:G. Mathematics of Computing
PACS-Classification:40.00.00 ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS
Date of first Publication:2016/02/02
Series (Serial Number):ZIB-Report (16-05)
ISSN:1438-0064
Published in:Proc. SPIE 9742, 97420M (2016)
DOI:https://doi.org/10.1117/12.2212367
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