Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle
Author: | Victor Soltwisch, Sven BurgerORCiD, Frank Scholze |
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Document Type: | Article |
Parent Title (English): | Proc. SPIE |
Volume: | 8789 |
First Page: | 878905 |
Year of first publication: | 2013 |
DOI: | https://doi.org/10.1117/12.2020487 |