Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
Author: | Matthias Plock, Sven BurgerORCiD, Philipp-Immanuel Schneider |
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Document Type: | Article |
Parent Title (English): | Proc. SPIE |
Volume: | 11783 |
First Page: | 117830J |
Year of first publication: | 2021 |
ArXiv Id: | http://arxiv.org/abs/2107.05499 |
DOI: | https://doi.org/10.1117/12.2592266 |