Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
Author: | Martin Hammerschmidt, Martin WeiserORCiD, Xavier Garcia Santiago, Lin Zschiedrich, Bernd Bodermann, Sven BurgerORCiD |
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Document Type: | Article |
Parent Title (English): | Proc. SPIE |
Volume: | 10330 |
First Page: | 1033004 |
Year of first publication: | 2017 |
ArXiv Id: | http://arxiv.org/abs/1707.08467 |
Preprint: | urn:nbn:de:0297-zib-64704 |
DOI: | https://doi.org/10.1117/12.2270596 |