Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
Please always quote using this URN: urn:nbn:de:0297-zib-64704
- We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.
Author: | Martin Hammerschmidt, Martin WeiserORCiD, Xavier Garcia Santiago, Lin Zschiedrich, Bernd Bodermann, Sven BurgerORCiD |
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Document Type: | ZIB-Report |
Tag: | computational lithography; computational metrology; finite- element methods; nanolithography; nanooptics; optical metrology |
MSC-Classification: | 78-XX OPTICS, ELECTROMAGNETIC THEORY (For quantum optics, see 81V80) |
CCS-Classification: | J. Computer Applications |
PACS-Classification: | 40.00.00 ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
Date of first Publication: | 2017/07/25 |
Series (Serial Number): | ZIB-Report (17-37) |
ISSN: | 1438-0064 |
Published in: | Appeared in: Proc. SPIE 10330, Modeling Aspects in Optical Metrology, (2017) |