Reduced basis method for electromagnetic scattering problem: a case study for FinFETs
- Optical 3D simulations in many-query and real-time contexts require new solution strategies. We study an adaptive, error controlled reduced basis method for solving parametrized time-harmonic optical scattering problems. Application fields are, among others, design and optimization problems of nano-optical devices as well as inverse problems for parameter reconstructions occurring e. g. in optical metrology. The reduced basis method pre- sented here relies on a finite element modeling of the scattering problem with parametrization of materials, geometries and sources.
Author: | Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Sven BurgerORCiD, Frank Schmidt |
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Document Type: | Article |
Parent Title (English): | Optical and Quantum Electronics |
Volume: | 48 |
First Page: | 250 |
Year of first publication: | 2016 |
Preprint: | urn:nbn:de:0297-zib-57556 |
DOI: | https://doi.org/10.1007/s11082-016-0530-1 |