Forward simulation of coherent beams on grating structures for coherent scatterometry
Author: | Martin Hammerschmidt, Lin Zschiedrich, Lauryna Siaudinyté, Phillip Manley, Philipp-Immanuel Schneider, Sven Burger |
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Document Type: | In Proceedings |
Parent Title (English): | Proc. SPIE |
Volume: | PC12619 |
First Page: | PC1261907 |
Year of first publication: | 2023 |
ArXiv Id: | http://arxiv.org/abs/2309.06109 |
DOI: | https://doi.org/10.1117/12.2673231 |