Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code]
Author: | Mika Pflüger, R Joseph Kline, Analía Fernández Herrero, Martin Hammerschmidt, Victor Soltwisch, Michael Krumrey |
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Document Type: | Research data |
Resource Type General: | Software |
Year of first publication: | 2020 |
DOI: | https://doi.org/10.24433/CO.0953516.v2 |