Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering
Author: | Mika Pflüger, R. Joseph Kline, Analia Fernández Herrero, Martin Hammerschmidt, Victor Soltwisch, Michael Krumrey |
---|---|
Document Type: | Article |
Parent Title (English): | J. Micro Nanolithogr. MEMS MOEMS |
Volume: | 19 |
First Page: | 014001 |
Year of first publication: | 2020 |
ArXiv Id: | http://arxiv.org/abs/1910.08532 |
DOI: | https://doi.org/10.1117/1.JMM.19.1.014001 |