GIXRF and machine learning as metrological tools for shape and element sensitive reconstructions of periodic nanostructures
Author: | Anna Andrle, Philipp Hönicke, Grzegorz Gwalt, Philipp-Immanuel Schneider, Yves Kayser, Frank Siewert, Victor Soltwisch |
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Document Type: | Article |
Parent Title (English): | Proc. SPIE |
Volume: | 11611 |
First Page: | 116110R |
Year of first publication: | 2021 |
DOI: | https://doi.org/10.1117/12.2586082 |