Benchmark of rigorous methods for electromagnetic field simulation
Author: | Sven BurgerORCiD, Lin Zschiedrich, Frank Schmidt, Peter Evanschitzky, Andreas Erdmann |
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Editor: | H. Kawahira, L. S. Zurbrick |
Document Type: | In Proceedings |
Parent Title (English): | Photomask Technology |
Volume: | 7122 |
First Page: | 71221 |
Publisher: | Proc. SPIE |
Year of first publication: | 2008 |
URL: | http://dx.doi.org/10.1117/12.801248 |
DOI: | https://doi.org/10.1117/12.801248 |