Efficient simulation of microscopic imaging for reconstruction of nanostructures
Author: | Phillip Manley, Jan Krüger, Bernd Bodermann, Rainer Köning, Andreas Heinrich, Christian Eder, Aksel Goehnermeier, Ulrike Zeiser, Martin Hammerschmidt, Lin Zschiedrich, Philipp-Immanuel Schneider |
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Document Type: | In Proceedings |
Parent Title (English): | Proc. SPIE |
Volume: | PC12619 |
First Page: | PC126190B |
Year of first publication: | 2023 |
DOI: | https://doi.org/10.1117/12.2673077 |