Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing
Author: | Emil Agcos, Bernd Bodermann, Sven BurgerORCiD, Gaoliang Dai, Johannes Endres, Poul-Erik Hansen, Lars Nielson, Morten Madsen, Sebastian Heidenreich, Michael Krumrey, Bernd Loechel, Jürgen Probst, Frank Scholze, Victor Soltwisch, Matthias Wurm |
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Document Type: | In Proceedings |
Parent Title (English): | Proc. SPIE |
Volume: | 9556 |
First Page: | 955610 |
Year of first publication: | 2015 |
DOI: | https://doi.org/10.1117/12.2190409 |