Numerical investigations of the influence of different commonly applied approximations in scatterometry
Author: | Johannes Endres, Sven BurgerORCiD, Matthias Wurm, Bernd Bodermann |
---|---|
Document Type: | Article |
Parent Title (English): | Proc. SPIE |
Volume: | 8789 |
First Page: | 878904 |
Year of first publication: | 2013 |
DOI: | https://doi.org/10.1117/12.2022108 |