Simulation method improves accuracy for optical metrology and nanooptics design
Author: | Sven BurgerORCiD |
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Document Type: | Article |
Parent Title (English): | SPIE Newsroom |
Year of first publication: | 2009 |
DOI: | https://doi.org/10.1117/2.1200905.1629 |
Author: | Sven BurgerORCiD |
---|---|
Document Type: | Article |
Parent Title (English): | SPIE Newsroom |
Year of first publication: | 2009 |
DOI: | https://doi.org/10.1117/2.1200905.1629 |