Domain decomposition method for electromagnetic scattering problems: application to EUV lithography
Author: | Lin Zschiedrich, Sven BurgerORCiD, Achim Schädle, Frank Schmidt |
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Document Type: | In Proceedings |
Parent Title (English): | Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices |
First Page: | 55 |
Last Page: | 56 |
Year of first publication: | 2005 |
DOI: | https://doi.org/10.1109/NUSOD.2005.1518132 |