Reconstructing phase aberrations for high-precision dimensional microscopy
Author: | Philipp-Immanuel Schneider, Phillip Manley, Jan Krüger, Lin Zschiedrich, Rainer Köning, Bernd Bodermann, Sven BurgerORCiD |
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Document Type: | Article |
Parent Title (English): | Proc. SPIE |
Volume: | 12137 |
First Page: | 121370I |
Year of first publication: | 2022 |
DOI: | https://doi.org/10.1117/12.2620762 |