3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method
Author: | Sven BurgerORCiD, Lin Zschiedrich, Frank Schmidt, Roderick Köhle, Thomas Henkel, Bernd Küchler, Christoph Nölscher |
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Editor: | Harald Bosse |
Document Type: | In Proceedings |
Parent Title (English): | Modeling Aspects in Optical Metrology |
Volume: | 6617 |
First Page: | 66170V |
Publisher: | Proc. SPIE |
Year of first publication: | 2007 |
DOI: | https://doi.org/10.1117/12.726236 |