Joint Research on Scatterometry and AFM Wafer Metrology
Author: | Bernd Bodermann, Egbert Buhr, Hans-Ulrich Danzebrink, Markus Bär, Frank Scholze, Michael Krumrey, Matthias Wurm, Petr Klapetek, Poul-Erik Hansen, Virpi Korpelainen, Marijn van Veghel, Andrew Yacoot, Samuli Siitonen, Omar El Gawhary, Sven BurgerORCiD, Toni Saastamoinen |
---|---|
Document Type: | Article |
Parent Title (English): | AIP Conference Proceedings |
Volume: | 1395 |
Issue: | 1 |
First Page: | 319 |
Last Page: | 323 |
Publisher: | AIP |
Year of first publication: | 2011 |
DOI: | https://doi.org/10.1063/1.3657910 |